A composition and an associated method for chemical mechanical planarization (or other polishing) are described. The composition includes a surface-modified abrasive modified with at least one stabilizer and at least one catalyst differing from the at least one stabilizer. The composition can further...http://www.google.es/patents/US7429338?utm_source=gb-gplus-sharePatente US7429338 - Surface modified colloidal abrasives, including stable bimetallic surface coated silica sols for chemical mechanical planarization
Surface modified colloidal abrasives, including stable bimetallic surface ...
