A method for polishing a substrate having at least one micro-sized structure. The method includes identifying a first region of the substrate on which a micro-sized structure is to be located. The first region is the region in which polishing is desired. A second region of the substrate, in which polishing...http://www.google.es/patents/US5378330?utm_source=gb-gplus-sharePatente US5378330 - Method for polishing micro-sized structures
