A method of manufacturing a micromachined thermal flowmeter is provided. The major manufacturing steps comprise forming an n-type region(s) in a p-type silicon wafer, forming heating and temperature sensing devices in the n-type region(s), converting the n-type region(s) into porous silicon by anodization...http://www.google.es/patents/US6139758?utm_source=gb-gplus-sharePatente US6139758 - Method of manufacturing a micromachined thermal flowmeter
Method of manufacturing a micromachined thermal flowmeter
