Installation for vacuum treatment, particularly of substrates, includes several identical independent and aligned modules. Each module is provided with a vacuum treatment chamber and a transfer chamber having a mechanism for transferring a substrate within one of the different chambers or from one chamber...http://www.google.es/patents/US7886686?utm_source=gb-gplus-sharePatente US7886686 - Installation for the vacuum treatment in particular of substrates
Installation for the vacuum treatment in particular of substrates
