In a method for producing a sensor arrangement and the resulting sensor arrangement, a sensor is provided on or in a chip and the chip is covered with a protective cover, the cover being an interface between the sensor and the environment. An adhesive layer is provided between the chip and the protective...http://www.google.es/patents/US7592195?utm_source=gb-gplus-sharePatente US7592195 - Method for producing a sensor or actuator arrangement, and corresponding sensor or actuator arrangement
Method for producing a sensor or actuator arrangement, and corresponding ...
