A micro-electromechanical actuator includes a substrate. An elongate actuator arm has a fixed end portion that is fast with the substrate and a free end portion that is spaced from the substrate. The elongate actuator arm incorporates a heating circuit that is connectable to a power supply to heat the...http://www.google.es/patents/US7028474?utm_source=gb-gplus-sharePatente US7028474 - Micro-electromechanical actuator with control logic circuitry
Micro-electromechanical actuator with control logic circuitry
