A method for monitoring the actual flow of a gas into a vacuum facility, which flow of gas resulting from setting a desired flow of gas by means of at least one adjustable mass flow controller, interconnected between said facility and a pressurized reservoir arrangement for said gas....http://www.google.es/patents/US6074691?utm_source=gb-gplus-sharePatente US6074691 - Method for monitoring the flow of a gas into a vacuum reactor
Method for monitoring the flow of a gas into a vacuum reactor
