This specification discloses antireflection film and an exposure apparatus using the same. The exposure apparatus has an optical system, and antireflection film formed on the refracting surface of the optical system, the antireflection film having a high refractive index layer having Al.sub.2 O.sub.3...http://www.google.es/patents/US5661596?utm_source=gb-gplus-sharePatente US5661596 - Antireflection film and exposure apparatus using the same
Antireflection film and exposure apparatus using the same
