To prevent process defects and wafer damage caused by improperly positioned wafers, a system and method for detecting a position of a wafer determines whether the wafer is properly positioned before executing a process. The system includes a chuck plate preferably having a supporting part configured...http://www.google.es/patents/US6601313?utm_source=gb-gplus-sharePatente US6601313 - System and method for detecting position of semiconductor wafer
System and method for detecting position of semiconductor wafer
