An interconnect for testing a semiconductor component includes a substrate, and interconnect contacts on the substrate configured to electrically engage component contacts on a semiconductor component. Each interconnect contact includes a compliant conductive layer formed as a conductive spring element....http://www.google.es/patents/US7411304?utm_source=gb-gplus-sharePatente US7411304 - Semiconductor interconnect having conductive spring contacts
Semiconductor interconnect having conductive spring contacts
