A method of manufacturing a probe test head for testing of semiconductor integrated circuits includes: defining shapes of a plurality of probes as one or more masks; a step for fabricating the plurality of probes using the mask; and disposing the plurality of probes through corresponding holes in a first...http://www.google.es/patents/US6977515?utm_source=gb-gplus-sharePatente US6977515 - Method for forming photo-defined micro electrical contacts
Method for forming photo-defined micro electrical contacts
