A modular semiconductor wafer processing system comprises a plurality of detachable process reactors and other types of generators that can be attached to any of several ports on the lid of a circular wafer handling chamber. A multiple-spoke single-axis rigid-arm transfer carousel centrally located within...http://www.google.es/patents/US5667592?utm_source=gb-gplus-sharePatente US5667592 - Process chamber sleeve with ring seals for isolating individual process modules in a common cluster
Process chamber sleeve with ring seals for isolating individual process ...
