An optically made, high-efficiency in-line holographic mask (ILHM) for in-line holographic patterning of a workpiece, and apparatus and methods for performing same. The ILHM of the present invention combines the imaging function of a lens with the transmission properties of a standard amplitude mask,...http://www.google.es/patents/US20040047014?utm_source=gb-gplus-sharePatente US20040047014 - In-line holographic mask for micromachining
Número de solicitud: 10/657,451 Número de publicación: US 2004/0047014 A1 Fecha de presentación: 8 Sep 2003 Patente emitida: US7099057 ( Fecha de emisión 29 Ago 2006)
