For a sensor whose sensor structure is implemented in a micromechanical structural component and which has parts which are movable in relation to the stationary substrate of the structural component, and which also includes ...http://www.google.es/patents/US20040129077?utm_source=gb-gplus-sharePatente US20040129077 - Sensor
Número de solicitud: 10/474,287 Número de publicación: US 2004/0129077 A1 Fecha de presentación: 1 Mar 2004 Patente emitida: US6923062 ( Fecha de emisión 2 Ago 2005)
