A semiconductor structure. The semiconductor structure includes: a substrate having a metal wiring level within the substrate; a capping layer on and above a top surface of the substrate; an insulative layer on and above a top surface of the capping layer; an inductor comprising a first portion in and...http://www.google.es/patents/US7741698?utm_source=gb-gplus-sharePatente US7741698 - Post last wiring level inductor using patterned plate process
Post last wiring level inductor using patterned plate process
