An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may...http://www.google.es/patents/US6816251?utm_source=gb-gplus-sharePatente US6816251 - Method and apparatus for detecting defects along the edge of electronic media
Method and apparatus for detecting defects along the edge of electronic media
