An apparatus and method for the real-time, in-line testing of semiconductor wafers during the manufacturing process. In one embodiment the apparatus includes a probe assembly within a semiconductor wafer processing line. As each wafer passes adjacent the probe assembly, a source of modulated light, within...http://www.google.es/patents/US6315574?utm_source=gb-gplus-sharePatente US6315574 - Method for real-time in-line testing of semiconductor wafers
Method for real-time in-line testing of semiconductor wafers
