A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals,...http://www.google.es/patents/US7586620?utm_source=gb-gplus-sharePatente US7586620 - Methods and systems for interferometric analysis of surfaces and related applications
Methods and systems for interferometric analysis of surfaces and related ...
