In evaluation and analysis of a semiconductor device using optical detection for a semiconductor chip, both front side analysis and back side analysis are enabled at low cost and a short TAT. A prober for conducting the analysis includes a board having a size equal to the size of a semiconductor wafer,...http://www.google.es/patents/US6686753?utm_source=gb-gplus-sharePatente US6686753 - Prober and apparatus for semiconductor chip analysis
Prober and apparatus for semiconductor chip analysis
