Reaction products produced under dry etching attach to a substrate undergoing dry etching. It is necessary to remove the reaction products for the next step. Therefore, in the case of the background art, the processing of supplying a remover for reaction products, an intermediate rinse for washing away...http://www.google.es/patents/US6805769?utm_source=gb-gplus-sharePatente US6805769 - Substrate processing apparatus
