An isolation region is formed on a substrate by forming spaced apart mesas on the substrate. A first insulation region is then formed on the substrate and second insulation regions are formed on the mesas, the first insulation region being disposed between and spaced apart from a respective...http://www.google.es/patents/US5677232?utm_source=gb-gplus-sharePatente US5677232 - Methods of fabricating combined field oxide/trench isolation regions
Methods of fabricating combined field oxide/trench isolation regions
