The invention is a storage cell capacitor and a method for forming the storage cell capacitor having a storage node electrode comprising a barrier layer interposed between a conductive plug and an oxidation resistant layer. A thick insulative layer protects the sidewalls of the barrier layer during the...http://www.google.es/patents/US5392189?utm_source=gb-gplus-sharePatente US5392189 - Capacitor compatible with high dielectric constant materials having two independent insulative layers and the method for forming same
Capacitor compatible with high dielectric constant materials having two ...
