An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A robot within the vacuum chamber 1 has a pair of gripper arms 22, 29 which are moveable along and rotatable about...http://www.google.es/patents/US6679675?utm_source=gb-gplus-sharePatente US6679675 - Method and apparatus for processing wafers
