A new method of producing an anti-reflection coating is described. The reflective metal layer of an integrated circuit is covered with titanium. The titanium layer is oxidized. The resulting titanium oxide layer is the anti-reflection coating (ARC) of the present invention. This ARC layer is covered...http://www.google.es/patents/US5286608?utm_source=gb-gplus-sharePatente US5286608 - TiO.sub.x as an anti-reflection coating for metal lithography
TiO.sub.x as an anti-reflection coating for metal lithography
