A semiconductor device includes an inorganic insulating layer on a semiconductor substrate, a contact plug that extends through the inorganic insulating layer to contact the semiconductor substrate and a stress buffer spacer disposed between the node contact plug and the inorganic insulating layer. The...http://www.google.es/patents/US7998851?utm_source=gb-gplus-sharePatente US7998851 - Semiconductor devices having contact plugs with stress buffer spacers and methods of fabricating the same
Semiconductor devices having contact plugs with stress buffer spacers and ...
