A workpiece surface is measured to detect a defective portion with a projection and a depression on the workpiece surface by using an optical inspecting apparatus having a projector for radiating a detecting light towards the workpiece surface and a picturing device for receiving a reflected light from...http://www.google.es/patents/US5566244?utm_source=gb-gplus-sharePatente US5566244 - Method of inspecting a workpiece surface including a picturing system with a shortened focal plane
Method of inspecting a workpiece surface including a picturing system with a ...
