A method is used to form an insulating layer with foamed structure. About the method, a gel layer over a substrate, where the gel layer includes several types of solution, an unextractable material, and a solvent. The substrate is then put in a closed pressure chamber. The closed pressure chamber is...http://www.google.es/patents/US6624092?utm_source=gb-gplus-sharePatente US6624092 - Method for forming low dielectric constant insulating layer with foamed structure
Method for forming low dielectric constant insulating layer with foamed ...
