A lithographic projection apparatus is disclosed where at least part of a space between a projection system of the apparatus and a substrate is filled with a liquid by a liquid supply system. The projection system is separated into two separate physical parts. With substantially no direct connection...http://www.google.es/patents/US7483118?utm_source=gb-gplus-sharePatente US7483118 - Lithographic projection apparatus and device manufacturing method
Lithographic projection apparatus and device manufacturing method
