A method of producing a MEMS device provides an apparatus having structure on a first layer that is proximate to a substrate. The apparatus has a space proximate to the structure. The method adds doped material to the space. The doped material dopes at least a portion of the first layer....http://www.google.es/patents/US7718457?utm_source=gb-gplus-sharePatente US7718457 - Method for producing a MEMS device
