A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement...http://www.google.es/patents/US8072578?utm_source=gb-gplus-sharePatente US8072578 - Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
Position measurement method, position control method, measurement method ...
