Stress within a suspension wall for suspending a showerhead in a process chamber is ameliorated by one or more of: (1) Openings in the suspension wall that reduce exposure of the suspension wall to process gas or ambient atmosphere when the chamber lid is opened. (2) A substantially vertical arrangement...http://www.google.es/patents/US7776178?utm_source=gb-gplus-sharePatente US7776178 - Suspension for showerhead in process chamber
