Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may...http://www.google.es/patents/US6869347?utm_source=gb-gplus-sharePatente US6869347 - Fabrication of devices with fibers engaged to grooves on substrates
Fabrication of devices with fibers engaged to grooves on substrates
