A number of methods and systems for overcoming stiction are provided. The systems include electromechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a...http://www.google.es/patents/US6856069?utm_source=gb-gplus-sharePatente US6856069 - Systems and methods for overcoming stiction
