A method and apparatus for manufacturing a semiconductor physical quantity sensor according to the present invention achieves the high sensing accuracy and reliability and prevents a sticking phenomenon. Specifically, a semiconductor physical quantity sensor is cleaned by a displacement liquid and is...http://www.google.es/patents/US6483283?utm_source=gb-gplus-sharePatente US6483283 - Semiconductor dynamic quantity-sensor and method of manufacturing the same
Semiconductor dynamic quantity-sensor and method of manufacturing the same
