A method is for manufacturing a microeletromechanical system resonator having a semiconductor device and a microelectromechanical system structure unit formed on a substrate. The method includes: forming a lower electrode of an oxide-nitride-oxide capacitor unit included in the semiconductor device using...http://www.google.es/patents/US7671430?utm_source=gb-gplus-sharePatente US7671430 - MEMS resonator and manufacturing method of the same
MEMS resonator and manufacturing method of the same
