A miniature chemical sensor using a thin film acoustic resonator coated with a chemically sensitive sorbent coating. The thin film acoustic resonator has electrodes separated by a thin piezoelectric layer and is supported by a multilayer resonant acoustic isolator. The resonant acoustic isolator has...http://www.google.es/patents/US5936150?utm_source=gb-gplus-sharePatente US5936150 - Thin film resonant chemical sensor with resonant acoustic isolator
Thin film resonant chemical sensor with resonant acoustic isolator
