A semiconductor wafer processing system including a multi-chamber module having vertically-stacked semiconductor wafer process chambers and a loadlock chamber dedicated to each semiconductor wafer process chamber. Each process chamber includes a chuck for holding a wafer during wafer processing. The...http://www.google.es/patents/US6846149?utm_source=gb-gplus-sharePatente US6846149 - Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
Semiconductor wafer processing system with vertically-stacked process ...
