A device for steering light and its method of manufacture are disclosed. The device in the preferred embodiment consists of a multi-layer structure on a substrate. The substrate contains at least one electrode (36) for addressing a deflectable element (16) causing it to deflect towards the activated...http://www.google.es/patents/US5212582?utm_source=gb-gplus-sharePatente US5212582 - Electrostatically controlled beam steering device and method
Electrostatically controlled beam steering device and method
