Techniques of shallow trench isolation and devices produced therefrom. The techniques of shallow trench isolation utilize foamed polymers, cured aerogels or air gaps as the insulation medium. Such techniques facilitate lower dielectric constants than the standard silicon dioxide due to the cells of gaseous...http://www.google.es/patents/US20020164859?utm_source=gb-gplus-sharePatente US20020164859 - Low dielectric constant shallow trench isolation
Número de solicitud: 10/184,592 Número de publicación: US 2002/0164859 A1 Fecha de presentación: 27 Jun 2002 Patente emitida: US6770537 ( Fecha de emisión 3 Ago 2004)
