A capacitor fabrication method may include atomic layer depositing a conductive barrier layer to oxygen diffusion over the first electrode. A method may instead include chemisorbing a layer of a first precursor at least one monolayer thick over the first electrode and chemisorbing a layer of a second...http://www.google.es/patents/US7109542?utm_source=gb-gplus-sharePatente US7109542 - Capacitor constructions having a conductive layer
