There are disclosed a semiconductor memory device and a method for fabrication thereof. The semiconductor memory device comprises a storage electrode connected with a source region of a MOSFET and formed with a wider area than that of the mask therefor, having a structure which is comprised of a spacer-shaped...http://www.google.es/patents/US5492850?utm_source=gb-gplus-sharePatente US5492850 - Method for fabricating a stacked capacitor cell in semiconductor memory device
Method for fabricating a stacked capacitor cell in semiconductor memory device
