Chemical-mechanical planarizing machines and methods to maintain processing pads and other planarizing media used in planarizing microelectronic workpieces. In one embodiment, a planarizing machine can include a surfacing device attached to one of a carrier or a support member. The surfacing device is...http://www.google.es/patents/US6666749?utm_source=gb-gplus-sharePatente US6666749 - Apparatus and method for enhanced processing of microelectronic workpieces
Apparatus and method for enhanced processing of microelectronic workpieces
