An illumination device includes a raidation source; an optical integrator having an array of lenses disposed along a plane perpendicular to an optical axis of the device; a first optical system for amplitude-dividing a coherent beam from the radiation source and producing plural beams which are substantially...http://www.google.es/patents/US5153773?utm_source=gb-gplus-sharePatente US5153773 - Illumination device including amplitude-division and beam movements
Illumination device including amplitude-division and beam movements