A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object. ...http://www.google.es/patents/US5841110?utm_source=gb-gplus-sharePatente US5841110 - Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems
Method and apparatus for improved temperature control in rapid thermal ...
