The described embodiments relate to substrates having features formed therein and methods of forming same. One exemplary method forms a blind feature through a majority of a thickness of a substrate, the blind feature being defined by at least one sidewall surface and a bottom surface. The method also...http://www.google.es/patents/US6930055?utm_source=gb-gplus-sharePatente US6930055 - Substrates having features formed therein and methods of forming
Substrates having features formed therein and methods of forming
