A piezoelectric resonator is disclosed. In one embodiment the piezoelectric resonator includes a semiconductor material, an electrode, and a piezoelectric material disposed between the semiconductor material and the electrode. ...http://www.google.es/patents/US20040021403?utm_source=gb-gplus-sharePatente US20040021403 - Piezoelectric on semiconductor-on-insulator microelectromechanical resonators and methods of fabrication
Piezoelectric on semiconductor-on-insulator microelectromechanical ...
Número de solicitud: 10/631,948 Número de publicación: US 2004/0021403 A1 Fecha de presentación: 31 Jul 2003 Patente emitida: US6909221 ( Fecha de emisión 21 Jun 2005)
