A water quality evaluation method capable of evaluating quality of water to be evaluated with high precision and a substrate contacting apparatus used in the water quality evaluation method are provided. The substrate contacting apparatus 10 has a sealing performance keeping the interior at a vacuum...http://www.google.es/patents/US8012755?utm_source=gb-gplus-sharePatente US8012755 - Water quality evaluation method and substrate contacting apparatus used
Water quality evaluation method and substrate contacting apparatus used
