This invention improves TFT characteristics by making an interface between an active layer, especially a region forming a channel formation region and an insulating film excellent, and provides a semiconductor device provided with a semiconductor circuit made of a semiconductor element having uniform...http://www.google.es/patents/US6838324?utm_source=gb-gplus-sharePatente US6838324 - Semiconductor device provided with semiconductor circuit made of semiconductor element and method of fabricating the same
Semiconductor device provided with semiconductor circuit made of ...
