In producing a semiconductor device by annealing with laser light irradiation, while a linear laser light is scanned in a direction perpendicular to a line, the annealing is performed for a semiconductor material. In this state, since an anneal effect in a beam lateral direction corresponding to a line...http://www.google.es/patents/US6613619?utm_source=gb-gplus-sharePatente US6613619 - Semiconductor device and method for producing the same
Semiconductor device and method for producing the same
