Pulsed processing methods and systems for heating objects such as semiconductor substrates feature process control for multi-pulse processing of a single substrate, or single or multi-pulse processing of different substrates having different physical properties. Heat is applied a controllable way to...http://www.google.es/patents/US6951996?utm_source=gb-gplus-sharePatente US6951996 - Pulsed processing semiconductor heating methods using combinations of heating sources
Pulsed processing semiconductor heating methods using combinations of ...
